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Opto Diode’s SXUV-Series of extreme ultraviolet (EUV) enhanced detectors features superior 13.5nm photolithography capability with stable responsivity in extreme UV exposure from 1nm to 190nm, making them ideal for the most critical measurements of EUV light.
SXUV series devices use a metal silicide window to address the issue of surface recombination in oxide windows (resulting in loss of 100% internal QE) after receiving several G-rad (SiO2) doses. SXUV series devices have nearly infinite radiation hardness to photons and are recommended for the detection of UV/EUV pulse radiation; high photon flux; and when pulse energy density is higher than 0.1 J/cm.
ODC have released a duo lateral position sensitive version of the SXUV family. This 5.0mm x 5.0mm active area detector provides sub-micron position resolution in combination with stable response during long-term exposure to EUV & UV.
For more information please visit our website, alternatively call 01225 780400 and we will help with your enquiry.
For more information on SXUV family: Silicon photodiodes for EUV & UV (0.1-400nm) talk to AP Technologies Ltd