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Features:
- Fully customisable to suit your process
- PC interface with full recipe control and data logging
- Fully customisable to suit your process
- Reliable PLC control
- Cooled or heated electrode
Highly modular design enables...
- Easy expandability
- Low cost chamber additions
- Bench top mounting of Process Chamber
- Minimal clean room real estate required
- Easily serviced
For more information on Plasma³ Process System talk to Benchtop Ltd
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