Compact SIMS Secondary Ion Mass Spectrometry

The Hiden Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry set to provide is ideal for nanometre depth resolution and near surface analysis.

For more information on Compact SIMS Secondary Ion Mass Spectrometry talk to Hiden Analytical Ltd