Moisture Event Solution for Semiconductor Industry

Michell Instruments is delighted to announce the launch of their trace moisture event sensor, PURA plus. The PURA plus is an on-line trace moisture event sensor designed for UHP inert gas applications in semiconductor fabs to allow installation at multiple locations at the final point of entry to the process tool. Installed in the gas distribution system the PURA plus provides rapid indication (less than 1 minute) of a moisture event as low as 20 ppb at 1 ppb baseline. To achieve this high speed of response while maintaining the extreme sensitivity Michell have invented a unique detection algorithm and combined it with a new developed UHP suitable ceramic sensor design. Besides other benefits it allows the PURA plus to meet the particulate shedding performance required by the semiconductor industry.

For more information on Moisture Event Solution for Semiconductor Industry talk to Michell Instruments Ltd