MONOVAT® Gate Valves

MONOVAT® gates are widely used on semiconductor tool platforms. Features of MONOVAT® Gates fitted with PPE materials: Available in a range of sizes and profiles for different semiconductor manufacturing platforms. A range of seal profiles designed to reduce localized stresses, resulting in improved seal performance and life time High levels of plasma and chemical resistance. Ultra-pure elastomers minimize particulation in processing environments.

For more information on MONOVAT® Gate Valves talk to Precision Polymer Engineering Ltd