Gas Analyser for Diamond CVD HPR-50

Sub ppm analysis of all components present or evolved during your diamond growth process. •CVD •PECVD•Process control / On-line real time monitoring•Contamination studies•By-products analysis•For improved reproducibility / product quality The HPR-50 jet separator mass spectrometer, a dedicated, custom-designed gas analysis system for monitoring of diamond growth processes, featuring: •High Sensitivity (to 5 ppb), Mass range options to 2500 amu.•Heated Inert inlet for characterisation of reactive intermediates / products.•Liquid N2 cryopanels for optimum vacuum / minimal spectral interference.•Penning Gauge and interlocks to provide over pressure protection.•20 - 400 Torr sampling pressure operation.•Stability (less than ±0.5% height variation over 24 h).•MASsoft control via RS232, RS485 or Ethernet LAN.•Soft Ionisation for the analysis of complex organics / appearance MS studies.

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