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DUAL MODE RGA systems for Vacuum Diagnostics and Process Monitoring •Process Monitoring•RGA/ Leak Detection•Virtual Leaks / Desorption•Outgassing studies•Bakeout cycles•Pump Performance•Chamber / Process gas Contaminants Hiden HMT RGA quadrupole mass spectrometers a unique dual mode RGA system examination of components present in a vessel or evolved from a process, featuring: •HMT mode for high pressure operation to 4x10-3 Torr (min pressure 4x10-8 Torr).•RGA mode for high sensitivity operation at P < 10-4 Torr (min pres1x10-11 Torr).•100 amu mass range, Remote (PC) Control interface via MASsoft HMT.•Stability (less than ±1% height variation over 24 h).•MASsoft HMT control via RS232, RS485 or multiple systems via Ethernet LAN.•Fast access, mixed mode scanning e.g. Trend and Analog in multiple-windows.•Simultaneous real time display of graphical and tabular trend analysis data.•Cursor for peak height identification under mouse control.•Real time background subtract, Automatic mass scale alignment.•Data export facility to ASCII format and to all Windows devices.•Dynamic Data Exchange facility for real time data transfer to other DDE client compatible Windows™ applications eg Excel, SPC-IV statistical process control software.
For more information on HMT High Pressure Residual Gas Analyser talk to Hiden Analytical Ltd
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