IG20 Ion Gun

State of the art ion gun for surface and depth analysis applications. •Static and Dynamic SIMS•Auger Electron Spectroscopy•Ion Beam Sputtering•Surface Science Studies•Rastering / Depth Profiling The Hiden IG20 Ion Gun for static and dynamic SIMS, featuring: •Intense ion beam with 100 µm spot size and energies from 0.5 – 5 keV.•High current density, up to 4.5 mA/cm2.•Electron impact ion source with Argon and Oxygen capability.•Steering optics for line scattering and beam rastering in depth profiling.•3° offset in the ion gun column for optimum rejection of neutrals.•Beam blanking facility for rapid beam switching in rastering applications.•Source differential pumping for reduced chamber gas load.•Easily replaceable twin filament assembly.•Sweep rates down to 64 µs.•Integrated operation with SIM and EQS probes for direct raster rate / area control.

For more information on IG20 Ion Gun talk to Hiden Analytical Ltd