Mass and Energy Analyser for Plasma Diagnostics - EQP

Complete energy resolved mass speciation and mass resolved energy analysis of all species in your plasma •Etching / Deposition Studies•Ion implantation / Laser Ablation•Residual Gas Analysis / Leak Detection•Plasma electrode coupling - follow electrode conditions during operation. •Analysis through a viewport, grounded electrode, driven electrode The Hiden EQP is a combined Mass / Energy analyser for the analysis of positive AND negative ions, neutrals, and radicals from plasma processes, featuring: •Software controlled Ion Extraction Optics for minimum plasma perturbation.•45° Electrostatic Sector analyser, Scan Energy at 0.05 eV increments/ 0.25eV FWHM.•Minimum perturbation of ion flight path & constant ion transmission at all energies.•Differentially pumped Triple filter Quadrupole, mass to 2500amu.•High Sensitivity / Stability Pulse Ion Counting Detector with 7 decade dynamic range.•Tuneable integral ioniser for appearance potential MS with electron attachment option.•Penning Gauge and interlocks to provide over pressure protection.•Signal gating 1ms resolution for pulsed plasmas or energy & mass distributions v time.•1000eV Option, Floating option up to 10keV, Faraday Cup for high density plasmas.•Mu-Metal, Radio-metal shielding options, high pressure operation option.•MASsoft control via RS232, RS485 or Ethernet LAN.

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