Mass and Energy Analyser for Plasma Diagnostics PSM

Complete energy resolved mass speciation and mass resolved energy analysis of all species in your plasma: •Ion beam Etching•Plasma Deposition Studies•Ion implantation / Laser Ablation•Residual Gas Analysis•Leak Detection The PSM is a differentially pumped mass spectrometer for the analysis of secondary ions and neutrals from plasma process, featuring: •Differentially pumped manifold with mounting flange to process chamber.•High sensitivity / stability triple filter quadrupole, mass range options to 2500amu.•Pulse ion counting detector with 7 decade dynamic range.•Energy analysis option by pole bias scanning ±100eV standard, 1000eV option.•Ion extraction / exclusion optics with tuneable integral ioniser for Appearance Potential MS with electron attachment option.•Penning gauge and interlocks to provide over pressure protection.•Signal gating to 1ms for pulsed plasmas or energy & mass distributions vs time.•Analysis of neutrals and radicals as standard, +ve / -ve ion analysis option.•Mu-Metal, Radio-metal shielding options, high pressure operation options.•MASsoft control via RS232, RS485 or Ethernet LAN.

For more information on Mass and Energy Analyser for Plasma Diagnostics PSM talk to Hiden Analytical Ltd