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Molecular beam epitaxy takes place in high vacuum or ultra-high vacuum. The most important aspect of MBE is the deposition rate (less than 50 nm/minute) that allows the films to grow epitaxially, that is the growth of a thin layer on the surface of a crystal so that the layer has the same structure as the underlying crystal.
For more information on MBE Systems for Quality Control and Characterisation of MBE Processes talk to Hiden Analytical Ltd
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