Quadrupole SIMS Analyser - MAXIM

state of the art secondary ion mass spectrometer for static and dynamic SIMS and SNMS applications. •Integral energy filter for ion acceptance at 30° to the probe axis•High transmission SIMS extraction ion optics•High efficiency electron impact SNMS ionizer•Triple mass filter•Pulse ion counting detector•Control electronics with Windows MASsoft PC software•Raster control for imaging and depth profiling Specification for MAXIM Analyser•SIMS - 3x106 cps/nA for 27Al+ sputtered from Al target by 5 keV Ar+ ions•SNMS - >80 cps/nA for 107Ag sputtered from Ag target by 5 keV Ar+ ions MAXIM the most sensitive quadrupole SIMS analyser for the most sensitive elemental analysis technique.•Mass range options: 300amu, 500amu or 1000amu•Detector: Ion counting detector, Positive and Negative ion detection, 107 cps•Mass filter: Triple filter•Pole diameter: 9mm•Bakeout: 250°C•Ion energy filter: 30° angular acceptance•Ioniser: Electron bombardment, single filament for SNMS and RGA

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