XBS MBE Deposition Rate Monitor / Control System

XBS Triple Filter Quadrupoles for Precision Gas Analysis and Scientific Applications. •MBE monitoring and control.•Molecular Beam Studies.•Multiple beam source analysis.•High Performance RGA.•Desorption / Outgassing studies / Bakeout cycles.•Chamber / Process gas Contaminants. Hiden XBS mass spectrometers for high precision scientific, process applications and MBE analysis, featuring: •High Sensitivity, Enhanced detection from 100% to 5ppb, mass range to 510 amu.•Enhanced long-term Stability (less than ±0.5% height variation over 24 h).•Crossbeam ion source, beam acceptance through +/- 35° to transverse axis.•Ion source control for soft ionisation and appearance potential mass spectrometry.•Enhanced sensitivity for high mass transmission, Automatic mass scale alignment.•2mm beam acceptance aperture – configured to specific user application.•Enhanced contamination resistance via the RF-only pre-filter stage.•Integral UHV compatible water-cooled shroud.•Detection limits down to 30 ions / s in molecular beam studies.•Monitor growth rates of 1Å / min and lower.•Windows™ based MASsoft control via RS232, RS485 or Ethernet LAN.

For more information on XBS MBE Deposition Rate Monitor / Control System talk to Hiden Analytical Ltd