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MA8 Semiautomatic Mask Aligner for up to 200mm
The semiautomatic MA8 is a manually loaded system that offers maximum flexibility for research and development or production processes. Available in two different configurations with leading edge technology, features and capabilities include:
- Processing of fragile, warped or part wafers and pieces from a few millimetres up to 200mm
- LED or Mercury lamp houses with excellent uniformity over the full exposure area
- Software to provide simulation and optimisation of the entire lithographic process
- Automated pattern recognition and alignment capability
- Sophisticated wedge Error Compensation (WEC) for optimal parallelism between substrate and mask
- Options include: Bond Alignment, SCIL / SMILE / UV-NIL Nanoimprint capability, Selective Plasma etc.
For more information on MA8 Semiautomatic Mask Aligner for up to 200mm talk to Inseto (UK) Ltd
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